Electron energy distribution and swarm parameters in DC Argon, Chlorine discharge and their mixtures

Abstract

A study of electron energy distribution function and some swarm parameters in a DC discharge of pure Argon and chlorine is presented using Boltzmann transport equation. Moreover, the electron swarm parameters namely are: drift velocity and ionization coefficient.
Reported electron cross-section data have been used in the calculation. The calculated distribution function are found to be remarked non-Maxwillian that have energy variations which reflect the import electron-molecule energy exchange processes It is notes that a small quantity of Cl2 affects the electron energy distribution function.